I look at the final chip in a process, because that is more likely to have utilized the process to the fullest extent, whereas the introductory clock speeds for a new process are more determined by the market situation. (To a lesser degree, in the 130nm process, that is also the case for the fastest chips: since the speedups from 90nm were apparently late in coming, we saw new 130nm speed grades long after 90nm had been introduced (Pentium 4 EE 3.46GHz, Athlon 64 FX-55)).
The factor below is the speedup factor relative to the fastest chip of the previous generation. The modified microarchitecture below typically means that pipeline got longer, which should allow higher clock rates, but this effect does not appear to be very pronounced; there are often also other changes, which may increase or decrease the average number of instructions executed per cycle (IPC).
feature final final size speed factor chip comments 0.8u 66MHz P5 0.5u 120MHz 1.82 P54C 0.35u 200MHz 1.67 P54C ---------------------------- modified microarchitecture 0.35u 233MHz 1.94 P55C 0.28u according to Wikipedia 0.25u 300MHz 1.29 Tillamook (mobile)
feature final final size speed factor chip comments 0.5u 150MHz original P6 target 0.35u 300MHz 2 Klamath 0.25u 600MHz 2 Katmai 0.18u 1100MHz 1.83 Coppermine 0.13u 1400MHz 1.27 Tualatin probably not tuned much -------------------------------- modified microarchitecture 0.13u 1700MHz 1.55 Banias (mobile) 0.09u 2266MHz 1.33 Dothan (mobile) 0.065u 2333MHz 1.03 Yonah (mobile) -------------------------------- modified microarchitecture (Core) 0.065u 2600MHz 1.15 Merom (mobile) (Merom XE 2800MHz@44W) 0.065u 3000MHz 1.32 Woodcrest (80W), Conroe (65W) 0.045u 3333MHz 1.11 Wolfdale -------------------------------- slightly modified microarchitecture (Nehalem) 0.045u 3200MHz 1.07 Bloomfield
feature final final size speed factor chip 0.35u 266MHz K6 0.25u 550MHz 2.07 K6-2
feature final final comments size speed factor chip 250nm 700MHz K7 180nm 1400MHz 2 Thunderbird reference for 180nm 180nm? 1700MHz Palomino partially 130nm? 130nm 2250MHz 1.61 Thoroughbred ---------------------------------- modified microarchitecture (K8) 130nm 2600MHz 1.86 Clawhammer 90nm 3200MHz 1.23 Windsor, Santa Rosa 65nm 3100MHz 0.97 Brisbane ---------------------------------- modified microarchitecture (K10) 65nm 2700MHz 0.84 Agena
feature final final size speed factor chip 180nm 2000MHz Williamette 130nm 3466MHz 1.73 Gallatin (Northwood 3400MHz) ----------------------------------- modified microarchitecture 90nm 3800MHz 1.10 Prescott 65nm 3800MHz 1.00